TESCOM 64-2600 Series 高純減壓閥 | High Purity Controls Division | |
| | 1/4" Point of Use Pressure Regulators
| |
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| Regulator | Description | Product Info. | Source Pressure | Delivery Pressure | Certified Inboard Leak Rate | Flow Range | Body Material |
FOCUS F1 Electronic Pressure Controller | ?Closed loop pressure control
?4-20mA, 1-5V, 0-10V
?Cv = .15
?5 Ra or 10 Ra microinch finishes | Catalog (TBD)
CAD | 600 PSIG | 90 PSIG | 1X10-9 | 0-100 SLPM | 316L SST or 316L SST VAR |
64-2600 Series | ?Single Stage
?Ultra-High Purity
?5 Ra or 10 Ra microinch finishes
?Electropolish or internal electropolish
?Free poppet design
?Hastelloy® trim available
?Cv=.06 (3500 PSIG max. inlet)
?Cv=.15 (600 PSIG max. inlet) | Catalog
CAD | 600,
3500 PSIG | 30,
60,
100,
250 PSIG | 1X10-9 | 0-100 SLPM | 316L SS or 316L SS VAR |
64-2800 Series | ?Single Stage
?Ultra-High Purity
?Tied diaphragm design
?Electropolish or internal electropolish
?5 Ra or 10 Ra microinch finishes
?Hastelloy® trim available
?Cv=.06 (3500 PSIG max. inlet)
?Cv=.15 (1000 PSIG max. inlet) | Catalog
CAD | 1000,
3500 PSIG | 30,
60,
100,
150 PSIG | 1X10-9 | 0-100 SLPM | 316L SS or 316L SS VAR |
64-3600 Series | ?Single Stage
?Ultra-High Purity
?Low Droop
?High sensitivity
?10 Ra microinch finishes
?Electropolish or internal electropolish
?Free poppet or tied diaphragm
?Hastelloy® trim available
?Cv=.06 (3500 PSIG max. inlet)
?Cv=.15 (600 PSIG max. inlet) | Catalog
CAD | 600,
3500 PSIG | 30,
60,
100,
150 PSIG | 1X10-9 | 0-100 SLPM | 316L SS |
64-5000 Series | ?Single Stage
?Ultra-High Purity
?Absolute Pressure
?Sub-atmospheric pressure control
?5 Ra or 10 Ra microinch finishes
?Cv=.06 (3500 PSIG max. inlet)
?Cv=.15 (600 PSIG max. inlet)
?Cv=.24 (120 PSIG max. inlet) | Catalog
CAD | 120,
600,
3500 PSIG | 28"Hg to:
15,
30,
60, or
100 PSIG
| 1X10-9 | 0-5 SLPM | 316L SS or 316L SS VAR |
74-2400 Series | ?Single Stage
?Ultra-High Purity
?Tied diaphragm design
?Internally springless & threadless
?Electropolish or Precision Electro-Polish
?5 Ra or 10 Ra microinch finishes
?Cv=.15 | Catalog
CAD | 600 PSIG | 30,
60,
100 PSIG | 1X10-9 | 0-100 SLPM | 316L SS VAR |
MR-2400 Series | ?Single Stage
?Ultra-High Purity
?Tied diaphragm design
?Internally springless & threadless
?5 Ra microinch finishes
?Electropolish or Precision Electro-Polish
?Cv=.06 (3500 PSIG max. inlet)
?Cv=.15 (600 PSIG max. inlet) | Catalog
CAD | 600,
3500 PSIG | 30,
60,
100 PSIG | 4X10-11 | 0-100 SLPM | 316L SS VAR |
12 Series | ?Single Stage
?Ultra-High Purity
?Miniature
?Tied diaphragm design
?Internally springless & threadless
?5 Ra or 10 Ra microinch finishes
?Electropolish or Precision Electro-Polish
?1.5" or 1.125" base | Catalog
CAD | 150 PSIG | 28"Hg to:
15,
30,
60, or
100 PSIG | 1X10-9 | 0-20,
0-50 SLPM | 316L SS VAR |
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