Stripe CDG100Dhs 0.1 ...1000 托/毫巴
INFICON Stripe 高速電容式隔膜真空計目前是速、高度準確的真空儀器。響應時(shí)間不到 2
ms，配備 EtherCAT
現場(chǎng)總線(xiàn)接口，開(kāi)拓了全新的應用領(lǐng)域。成熟的控溫、防腐蝕、超純陶瓷傳感器能長(cháng)期提供出眾的量程穩定性，而且具有的零位穩定性。Stripe 隨附
INFICON 已獲的傳感器屏蔽，用于保護真空計，使其免受不需要的過(guò)程副產(chǎn)品的影響。INFICON Stripe
使用創(chuàng )新的加熱概念，提供冰涼的接觸表面和的速度性能，可實(shí)現的生產(chǎn)力提升，使其成為同類(lèi)產(chǎn)品中的真空儀器。
益處
- 高生產(chǎn)力 - 響應時(shí)間快于 2 ms
- 靈活集成 - EtherCAT 現場(chǎng)總線(xiàn)
- 使用壽命長(cháng) - 經(jīng)驗證的陶瓷傳感器
- 忘記重新校準 - 90ppm/年穩定性
典型應用
- 原子層沉積
- 高速過(guò)程控制
- PVD、CVD、刻蝕
- 一般高溫真空應用
零件號
規格
| 類(lèi)型 | 1000 ... 500 Torr / mbar | 200 ... 1 Torr / mbar | 0.5 ... 0.1 Torr / mbar | |
|---|---|---|---|---|
| 精度 (1) | % of reading | 0.2 | 0.2 | 0.4 |
| 溫度效應 | ||||
| 零點(diǎn) | percent FS/°C | 0.0025 | 0.0025 | 0.005 |
| 滿(mǎn)量程 | % of reading / °C | 0.02 | 0.02 | 0.02 |
| 壓力， | kPa (absolute) | 400 | 260 | 130 |
| 分辨率 | percent FS | 0.003 | 0.003 | 0.003 |
| 讀數 | percent FS | 0.01 | 0.01 | 0.01 |
| 建議的讀數 | percent FS | 0.05 | 0.05 | 0.05 |
| 建議的控制壓力 | percent FS | 0.5 | 0.5 | 0.5 |
| 溫度 | ||||
| 運行（環(huán)境） | °C | +10 … +50 | +10 … +50 | +10 … +50 |
| 在法蘭處烘烤 | °C | ≤110 | ≤110 | ≤110 |
| 貯存 | °C | –20 … +85 | –20 … +85 | –20 … +85 |
| 電源電壓 | +14 … +30 VDC or ±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) | |
| 功耗 | ||||
| 加熱時(shí) | W | ≤16 | ≤16 | ≤16 |
| 運行溫度 | W | ≤11 | ≤11 | ≤11 |
| 輸出信號（模擬） | V (dc) | 0 … +10 | 0 … +10 | 0 … +10 |
| 反應時(shí)間 (2) | ms | 2 | 2 | 2 |
| 保護等級 | IP 30 | IP 30 | IP 30 | |
| 標準 | ||||
| CE 合規 | EN 61000?6?2/-6-3, EN 61010 & RoHS | EN 61000?6?2/-6-3, EN 61010 & RoHS | EN 61000?6?2/-6-3, EN 61010 & RoHS | |
| ETL 認證 | UL 61010?1, CSA 22.2 No.61010?1 | UL 61010?1, CSA 22.2 No.61010?1 | UL 61010?1, CSA 22.2 No.61010?1 | |
| SEMI 合規 | SEMI S2 | SEMI S2 | SEMI S2 | |
| 電氣連接 | D-sub, 15 pole, male | D-sub, 15 pole, male | D-sub, 15 pole, male | |
| 設定點(diǎn) | ||||
| 設定點(diǎn)數量 | 2 (SP1,SP2) | 2 (SP1,SP2) | 2 (SP1,SP2) | |
| 繼電器觸點(diǎn) | V (dc)A (dc) | ≤30 | ≤30 | ≤30 |
| 滯后 | percent FS | 1 | 1 | 1 |
| 診斷端口 | ||||
| 協(xié)議 | USB | USB | USB | |
| 讀數 | pressure, status, ID | pressure, status, ID | pressure, status, ID | |
| 設置 | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | |
| 暴露于真空的材料 | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | |
| 內部容積 | ||||
| 內部容積 1/2'' 管 | cm3 (in.3) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
| 內部容積 DN 16 ISO KF | cm3 (in.3) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
| 內部容積 DN 16 CF-R | cm3 (in.3) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
| 內部容積 8 VCR® | cm3 (in.3) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
| 重量 | ||||
| 重量 1/2'' 管 | g | 837 | 837 | 837 |
| 重量 DN 16 ISO KF | g | 852 | 852 | 852 |
| 重量 DN 16 CF-R | g | 875 | 875 | 875 |
| 重量 8 VCR® | g | 897 | 897 | 897 |
| EtherCAT | ||||
| 協(xié)議 EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | |
| 通訊標準 | ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" | ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" | ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" | |
| 節點(diǎn)地址 | Explicit Device Identification | Explicit Device Identification | Explicit Device Identification | |
| 物理層 | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | |
| 數字功能讀取 | pressure, status, ID | pressure, status, ID | pressure, status, ID | |
| 數字功能設置 | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, reset, DC offset | |
| 過(guò)程數據 | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | |
| 郵箱 (CoE) | SDO requests, responses and information | SDO requests, responses and information | SDO requests, responses and information | |
| EtherCAT 連接器 | RJ45, 8-pin (socket), IN and OUT | RJ45, 8-pin (socket), IN and OUT | RJ45, 8-pin (socket), IN and OUT | |
| 電纜 | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | |
| 電纜長(cháng)度 | m (ft.) | ≤100 (330) | ≤100 (330) | ≤100 (330) |
(1) 非線(xiàn)性，遲滯，在 25 °C 環(huán)境工作溫度中的可重復性，2 小時(shí)工作后無(wú)溫度影響。
(2) 提高 10 … 90 % FS
