全自動(dòng)晶圓切膜機（真空）STK-7200V特點(diǎn)： |
無(wú)滾輪的特殊真空安裝技術(shù)(滾輪安裝可選) |
配置進(jìn)口多軸晶圓搬運機械手臂 |
可以應對更薄的晶圓進(jìn)行切割膜的貼膜 |
晶圓位置和翹曲智能反饋 |
17英寸觸摸屏液晶工業(yè)電腦控制 |
貼膜動(dòng)作：全自動(dòng)拉膜和貼膜，收廢膜 |
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STK-7200V Fully Automatic Wafer Vacuum Mounter Specifications： |
Wafer Size | Diameter:4”, 5”, 6” & 8” |
Wafer Thickness | 80 ~ 750 um |
Wafer material | Si, SiC |
Wafer Type | Single Flat, Double Flat or V-Notch |
Tape Type | Blue Tape or UV Tape Width :230、300 mm, Length:100 m; Thickness: 0.05 ~ 0.2 mm |
Frame Type | 6” DISCO or K&S, 8” DISCO or K&S; or Customer Specified |
Mounting Theory | Vacuum Mounting |
Wafer Place Accuracy | X-Y: +/- 0. 1 mm Θ: +/- 0.1° |
Input & Output | Dual Input Wafer Cassette / Single Output Frame Cassette |
ESD Control | ESD Roller / ESD Wafer Chuck / ESD Ion Blower |
Wafer Transfer | Horizontal Multi Axis Robot with Vacuum or Bernoulli Endeffector Wafer Position & Warpage Intelligent Mapping in Cassette |
Wafer Alignment | Fiber Sensor for Wafer Alignment |
Control Unit | Standard Industrial PC with 17” Touch Panel LCD / Windows O/S |
Power Supplier | Single Phase AC 220 V, 25A |
Air Supplier | 5.0 Kgf/cm2 CDA, 150 L/min |
Machine Construction | Made of Full Aluminium Profile |
Dimensions | 1750 mm (W) × 1350 mm (D) × 1800 mm (H) |
Net Weight | 870 Kg |
